HORIBA offer a choice of products within pressure control to monitor, regulate or control the pressure in a gas supply line.
HORIBA pressure control products include digital high performance pressure sensors and piezo valves. They can help eliminate the effects of cross talk caused by switching high flow lines.
HORIBA wafer cooling system uses helium gas to reduce heat damage and our exhaust pressure controller maintains a consistent level of pressure in a chamber.
Wafer Back Side Cooling System
Wafer Back Side Cooling System
Piezo Actuator Valve
Digital Automatic Pressure Regulator
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