H2O2 監測儀

HZ-960HPO-M

過氧化氫溶液濃度監測儀，用於半導體和太陽能電池的清潔過程，以去除顆粒和金屬離子雜質。

能夠高精度測量過氧化氫溶液濃度，最小解析度為 1 ppm，適合低濃度化學處理。

事業部: Semiconductor

產品分類: Wet Process Control

製造商: HORIBA Advanced Techno Co., Ltd.

Abundance of Measurement Options
In addition to the standard measurement range of 0–1 mass% for hydrogen peroxide, there are three additional measurement ranges available. Recommendations for the optimal range will be provided.

Choice of Pipe Sizes
In addition to the standard 3/4-inch size, 1/2-inch and 1-inch sizes can be chosen.

High reproducibility and stability accuracy are ensured.
The reproducibility accuracy is within FS+/- 0.2%.

Specifications of HZ-960HPO-M
Corresponding detector	ZH-10HPO	ZH-40HPO	ZH-100HPO	ZH-500HPO
Measurement range	0 - 1000 ppm	0 - 4000 ppm	0 - 1%	0 - 5%
Supply temperature	5 - 30 deg.C			5 - 80 deg.C
Chemical contact material of detector	PFA, PTFE, quartz glass
Supply pressure	Within 0.5 MPa
Repeatability	+/- 0.2% of full scale
Linearity	+/- 1.0% of full scale
Transmission output	Number of output: 2
Contact input	Number of output: 5
Communication output	RS-485
Power supply	Rated voltage 24 +/- 10% V DC, 15W

scrollable

Schematics

尺寸 0.26 MB

〈Catalog〉Dissolved Ozone / Hydrogen Peroxide Concentration Monitor HZ-960 / HZ-960HPO-M Series

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