溶解臭氧監測儀

HZ-960

專為半導體裝置、液晶和玻璃濕式加工而設計的溶解臭氧濃度監測儀。

它適用低濃度化學處理，非常適合測量各種溶解臭氧濃度，最高可達 500 ppm。

事業部: Semiconductor

產品分類: Wet Process Control

製造商: HORIBA Advanced Techno Co., Ltd.

Abundant Measurement Options
In addition to the standard measurement range of 0-100 mg/L for ozone, it offers three additional measurement ranges. Suggestions for the optimal range is provided.

Choice of Pipe Sizes
In addition to the standard 3/4 inch, choices can be made from 1/2 inch and 1 inch sizes.

High Reproducibility Accuracy and Stability Accuracy
Reproducibility accuracy within FS +/- 0.2%.

Corresponding detector	ZH-10	ZH-40	ZH-100	ZH-500
Measurement range	0 - 10.00mg/L	0 - 40.00mg/L	0 - 100mg/L	0 - 500mg/L
Supply temperature	5 - 30 deg.C			5 - 80 deg.C
Chemical contact material of detector	PFA, PTFE, quartz glass
Supply pressure	Within 0.5 MPa
Repeatability	+/- 0.2% of full scale
Linearity	+/- 1.0% of full scale
Transmission output	Number of output: 2
Contact output	Number of output: 5
Contact input	Number of input: 2
Communication output	RS-485
Power supply	Rated voltage 24 +/- 10% V DC, 15W

scrollable

Schematics

尺寸 0.26 MB

〈Catalog〉Dissolved Ozone / Hydrogen Peroxide Concentration Monitor HZ-960 / HZ-960HPO-M Series

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