線上感測器和自動量測切換濃度監測儀

HF-960EM

符合半導體製程標準的氫氟酸濃度監測儀。將感測器與完全 PFA（全氟烷氧基）接液零件結合在一起，尺寸優化至絕對極限。

它還可以處理高達 50% HF 濃度的寬範圍測量，滿足半導體製程的要求。

事業部: Semiconductor

產品分類: Wet Process Control

製造商: HORIBA Advanced Techno Co., Ltd.

Wide-range Compatible
The auto-ranging feature, from low concentration to high concentration (up to 50% HF concentration), enables optimal measurement performance at each target concentration.

Contamination-free
Employing a sensor with a sanitary structure, using only PFA as the wetted material. Being a chemically resistant sensor, it is capable of measuring various chemicals used in semiconductor processes.

High Stability/Reproducibility Accuracy
It achieves a reproducibility accuracy of ±0.5% FS.

Concentration Conversion Function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemical solutions.

Specifications of HF-960EM
Model name	HF-960EM
Measurement range	HF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm
Repeatability	+/- 0.5% F.S. (in equivalent input)
Linearity	+/- 0.5% F.S. (in equivalent input)
Transmission output	Number of output: 4
Contact output	Outputs: 5 points
Contact input	Inputs: 2 points
Communication output	RS-485
Power supply	DC 24 V +/- 10% 15W
Compatible sensor	CM-520 Series
Wetted material of sensor	PFA

scrollable

Schematics

尺寸 1.56 MB

〈Catalog〉Semiconductor Analyzers for Wet Proces

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