Wide range TMAH Concentration Monitor HE-960H-TM - HORIBA
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United States
HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

寬範圍 TMAH 濃度監測儀

HE-960H-TM

TMAH 濃度監測儀非常適合顯影液 TMAH 濃度管理。

採用高度耐化學腐蝕的 4 極碳感測器,可在較寬的範圍內測量 TMAH 濃度(光阻顯影液的主要成分)。

CONDChemical Concentration

AC(100-240V)Transmission OutputContact OutputSingle Component

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

Wide-range Compatibility

Measurement is possible in the TMAH concentration range of 0.000% to 10.00% with automatic decimal point adjustment.

Automatic Switching of Display Range

Automatically switches the display range from high to low concentration.  Furthermore, it is feasible to monitor changes while preserving effective conductivity resolution.

Sensor with Excellent Chemical Resistance

This sensor employs a chemically resistant 4-pole flow-through glass carbon sensor.

3 Measurements

Capable of three types of measurements: TMAH concentration, conductivity, and temperature.

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics.  It is particularly suitable for dilution management of low-concentration chemicals.

Indication Converter

ModelHE-960H-TM
Measurement range0 - 10%
Ambient environmentTemperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation)
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series (flow-type carbon sensor)
scrollable

Schematics

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