質量流量控制器與模組

Mass Flow Controller and Module

液體氣化控制器

Liquid Precursor Vaporizer

壓力控制器

Pressure Controller

­­­真空與氣體監測器

Vacuum and Gas Monitoring

Vacuum Gauge

Fully Automated Thin Film Inspection System

顆粒檢測機

Particle Detection

等離子監測與控制器

Plasma Monitor and Controller

化學品監測儀

Chemical Monitoring

非接觸式溫度測量器

Non-Contact Temperature Measurement

顆粒分析儀

Particle Analysis

表面分析儀

Surface Analysis

薄膜分析器儀

Thin Film Analysis

缺陷/雜質分析儀

Defect/Impurity Monitoring

排放分析儀

Emission Analysis

AMC Monitoring System

廠務機台

Facilities

Liquid Auto Refill System

Plant Wastewater Measurement Products

Ultrapure Water Measurement Products

混合應用系統

Mixer application system