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United States

HE-960H-PA

磷酸監測儀

蝕刻過程中所使用的磷酸濃度監測儀(純化的磷酸溶液)

採用玻璃碳感測器最大限度地減少高濃度下的偏振效應,僅對磷酸進行 80-90 wt% 範圍內的濃度測量

CONDChemical Concentration

DC24VTransmission OutputContact OutputRS-485Single Component

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

Sensor with Excellent Chemical Resistance

Makes use of a chemical resistant glass carbon sensor.

High Precision

Capable of accurately measuring high-concentration phosphoric acid (80–90wt% within a temperature range of 20–100°C).

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics.  It is particularly suitable for the dilution management of low-concentration chemicals.

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