HORIBA have developed one of the smallest mass spectrometer systems. The compact size is achieved by the patented design of miniature array of quadrupole mass filters. The array offers similar or greater sensitivity than conventional mass spectrometers but in a fraction of the volume. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced. The RGA can be used as a reliable tool to detect the condition of the vacuum chamber prior to processing; for example to detect moisture in a vacuum chamber.

HORIBA Vapor Concentration Monitors are reliable and offer high performance using non-dispersive infrared Absorptiometry measurement technique (NDIR).