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Unique modular microspectroscopy solution from the leader in spectroscopy

The SMS systems pack high performance on a modular platform, providing the ultimate flexibility in configuring microspectroscopy solutions that are uniquely suited to your needs. Their flexibility and versatility enables the affordable combination of multiple spectroscopic techniques such as Raman, Photoluminescence and Lifetime, etc., on one platform.

Multiple spectroscopic techniques on one platform

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Resources

Microspectroscopy Your Way!

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Watch how we can customize your microscope to perform several spectroscopy techniques or choose a turnkey microscopy system.

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SMS-Cryo Brochure

Cryogenic Low Temperature Micro-Spectroscopy Solutions

SMS Systems Brochure

Discover HORIBA’s modular spectroscopic performance, with flexibility, versatility and an affordable combination of multiple spectroscopic techniques, including Raman, Photoluminescence and Lifetime on one platform.

Spectroscopic characterization and detection of yield-killing defects in micro-LED wafers

Emerging display technologies demand high brightness, low power consumption and longer lifetime. Arrays, of self-emitting, micron-sized LEDs or Micro-LED (µLED), are considered a strong contender to replace current OLED or LCD displays.

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Videos

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Learn how our Standard Microscope Spectroscopy systems can add unique spectroscopic techniques to your microscope.

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We show you how we can add various spectroscopy techniques to your existing microscope with light sources, detectors, cameras and spectrometers for multiple applications.

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No wafer too large for this customized system.

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Webinars

In this webinar, we show the relevance of applying spectroscopic tools such Raman, Photoluminescence, Time-Resolved Photoluminescence and Cathodoluminescence in characterizing key wafer performance parameters for wide bandgap materials.

The simultaneous need to increase performance and reduce cost for today's semiconductor devices means using ever larger wafers, while reducing the size of device structures, thereby increasing their complexity. This combination of requirements means the metrology tools for characterizing such wafers need to evolve to handle such large wafers – up to 300mm in diameter. At the same time, these tools need to increase in sophistication to unravel the complexity in the ever-smaller device structures.

In this webinar, we show results from a multimodal microspectroscopy system from HORIBA for semiconductor characterization. The so-called SMS system is a modular and flexible system capable of accommodating up to seven different spectroscopies including Raman, Photoluminescence, Time-Resolved Photoluminescence (Lifetime), Reflectance and Transmittance, etc.

In this webinar, we present a novel concept that adds various spectroscopies on any optical microscope – the so-called Standard Microscope Spectroscopy Systems or SMS.

In this webinar, we briefly introduce the phenomenon and technique of photoluminescence spectroscopy as well as its place and range of applicability among other techniques for semiconductor material characterization.

In this webinar, we discuss the spectroscopic capabilities of the SMS system, showing example applications for Raman, Photoluminescence (Fluorescence), Lifetime, Reflectance, Transmittance, Darkfield Scattering, and Electroluminescence.

In this webinar, we present a novel concept that adds various spectroscopies to any optical microscope – the so-called Standard Microscope Spectroscopy Systems or SMS.

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