CMP slurry dispersibility analysis

Particle dispersion analysis in slurry stock solution

For quality control of CMP slurry, we were able to quickly distinguish between OK products with a size of 100 nm or less and coarse particles (NG products) with a size of around a few μm.

Laser diffraction/scattering particle size distribution measuring analyzer Partica LA-960V2

Compatible with particle sizes from 10 nm to 5000 μm
Guaranteed high accuracy of ±0.6% against NIST traceable standard samples
Particle size distribution under high concentration conditions can be measured using a high concentration cell.

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