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Products

Mass Flow Controller and Module

Liquid Source Vaporizer

Pressure Controller

Gas Monitoring & Analyzer

Vacuum Gauge

Fully Automated Thin Film Inspection System

Particle Detection System

Plasma Monitor and Controller

Chemical Concentration Monitor

Non-contact Infrared Thermometer

Particle Characterization Analyzer

Surface Analysis Spectrometer

Thin Film Analysis System

Defect / Impurity Monitoring System

Emission Analysis Spectrometer

AMC Monitoring System

Factory Emission Gas Analyzer

Liquid Auto Refill System

Plant Wastewater Measurement Products

Ultrapure Water Measurement Products

Mixer application system

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