Mass Flow Controller and Module - HORIBA
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Mass Flow Controller and Module

In a variety of manufacturing processes and research laboratories HORIBA Mass Flow Controller offer precise measurement and reliable control of gas.

Digital Mass Flow Controller

High-end mass flow controller

Mass Flow Module

Flow Control Modules for  Advanced Semiconductor Process

General Purpose Mass Flow Controller

General-purpose mass  flow controller with basic  performance equivalent  to higher-end models

High Temperature Mass Flow Controller

High-Temperature Mass Flow Controller

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