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Fluid Control

Fluid Control

Measurement and control technology in semiconductor manufacturing process chambers

Exhibition Panels

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Measurement and control technology in semiconductor manufacturing process chambers

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Measurement and control technology in semiconductor manufacturing process chambers

Product Catalogs

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NEW!! High Speed & Precision Pressure Insensitive Mass Flow Module

D700MG

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1.41 MB
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NEW!! Wide Range Pressure Insensitive Mass Flow Module

D700WR

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1.76 MB
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Differential Pressure Mass Flow Controller

CRITERION D500

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1.06 MB
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Differential Pressure Ultra-thin Mass Flow Controller

DZ-100

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0.48 MB
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High Performance Thermal Mass Flow Module

SEC-Z700S Series

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1.41 MB
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Thermal Mass Flow Controller

SEC-Z500X Series

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0.6 MB
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Thermal Flow Splitter

FS-3000

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1.14 MB
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Auto Pressure Regulator

GR-511F

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0.57 MB
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High Performance Liquid Vaporization System

XF-100\MV-2000 Series

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